Fiber optic probe head for detecting form or distance, particularly coarse surface area of specimen of interferometric measuring arrangement, comprises non-discretely built Fizeau interferometer for introducing partial beams

摘要

The fiber optic probe head (20) comprises an optical fiber (21), particularly glass fiber. A non-discretely built Fizeau interferometer (23) is assigned for introducing partial beams (24) coupled on probe head side with an optical path length difference to a specimen (30) and return of partial beams (25) coupled on the specimen side without optical path length difference of the optical fiber. The Fizeau interferometer balances the optical path length difference of the partial beams. An independent claim is included for an interferometric measuring arrangement for detecting the form or the distance, particularly coarse surface area of a specimen.