| 摘要 |
<P>PROBLEM TO BE SOLVED: To optimize polishing throughput and simultaneously provide desired flatness and finish. <P>SOLUTION: A carrier head has flexible members defining a first chamber, a second chamber and a third chamber connected to a base. Lower surfaces of the flexible members enclose an internal portion associated with the first chamber and the internal portion thereof, a substantially circular intermediate portion associated with the second chamber and the intermediate portion thereof, and is provided with a substrate receiving surface having a substantially circular external portion associated with the third chamber, the width of the external portion may be apparently smaller than that of the intermediate portion, the carrier head 200 may also include a flange 150 connected to a drive shaft and a gimbal pivotally connected with the flange 150 as a base is provided. <P>COPYRIGHT: (C)2010,JPO&INPIT |
