| 摘要 |
PROBLEM TO BE SOLVED: To provide an adamantyl ester of an unsaturated acid, imparting excellent etching resistance and also having a hydroxy group advantageously utilizable for a crosslinking reaction, etc. SOLUTION: This adamantyl ester of the unsaturated carboxylic acid is expressed by formula (1) [wherein, R<SP>1</SP>is H or a 1-6C alkyl; (p) is 0 or an integer of ≥1; (m), (n) are each an integer of ≥1; when the (m) is ≥2, m(n)s are the same or different; and an adamantane ring may have a substituent other than the substituting groups shown in the formula]. COPYRIGHT: (C)2010,JPO&INPIT
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