OPTICAL INSPECTION SYSTEM, AND AN INSPECTION METHOD FOR INSPECTING OBJECTS IN WHICH THE SAID SYSTEM IS USED

摘要

The present invention concerns an optical inspection system for inspecting diverse inspection objects, and it concerns an inspection method for inspection objects in which the said system is used. The system of the present invention comprises: a work-piece stage having a table on which is placed an inspection object; a plurality of linescan cameras; and a computer for processing scanned images of inspection objects. The upper surface of the table is provided with a plurality of markings having marking stage coordinate values in such a way as to allow the acquisition of a scanned image by means of the linescan cameras. Among the markings, two markings which are adjacent to each other are located within the respective fields of vision of the linescan cameras. Among the markings, the markings between the first marking and the final marking are respectively located in such a way as to overlap within the fields of vision of two linescan cameras which are adjacent to each other among the plurality of linescan cameras.  When the inspection method of the present invention is employed, markings image coordinate values and work-piece image coordinate values are used to calculate work-piece image - stage coordinate values from work-piece image coordinate values, and a decision is made that the inspection object is acceptable if the work-piece image - stage coordinate values satisfy the permissible error with respect to the work-piece stage coordinate values.