发明名称 |
DEVICE WITH ENCAPSULATED INTEGRATED CIRCUIT AND A N/MEMS AND METHOD FOR PRODUCTION |
摘要 |
The invention relates to a method for production of a device (100), comprising at least one integrated circuit (104) and at least one N/MEMS (122), comprising at least the following steps: production of the N/MEMS in at least one upper layer (116) arranged at least above a first section of a substrate (120), production of the integrated circuit in a second section of the substrate and/or in a semiconductor layer arranged at least above the second section of the substrate and further comprising the production of a cover (124) encapsulating the N/MEMS from at least one layer used for the production of a grid (114) in the integrated circuit and/or for the production of at least one electrical contact(128, 130, 132, 134) of the integrated circuit. |
申请公布号 |
WO2009071595(A3) |
申请公布日期 |
2009.11.05 |
申请号 |
WO2008EP66733 |
申请日期 |
2008.12.03 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;STMICROELECTRONICS (CROLLES 2) SAS;OLLIER, ERIC;BARON, THOMAS |
发明人 |
OLLIER, ERIC;BARON, THOMAS |
分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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