PROCESS FOR PRODUCTION OF WATER-REACTIVE Al FILM AND CONSTITUENT MEMBERS FOR FILM DEPOSITION CHAMBERS

摘要

A water-reactive Al film consisting of Al crystal grains and In which is uniformly dispersed in the Al crystal grains can be produced by melting a material consisting essentially of 4N Al (aluminum having a purity of 99.99%) or 5N Al (aluminum having a purity of 99.999%) and 2 to 5wt% (based on Al) of In in such a way as to give a uniform composition, spraying the resulting molten material onto the surface of a substrate by a flame spraying method, and solidifying the sprayed material by rapid cooling.  A constituent member for a film deposition chamber, which member is provided with the water-reactive Al film on the surface.