CARBOXYL-CONTAINING LACTONE COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS

摘要

PURPOSE: A lactone compound containing carboxylic group is provided to ensure high transparency to less than 500 nm radiation. CONSTITUTION: A lactone compound containing carboxylic group is denoted by the chemical formula 1. In the chemical formula 1, R1 is hydrogen atom, fluorine atom, methyl group or trifluoromethyl group; R2 and R3 are independently straight, branched or cyclic hydrocarbon radical or hydrogen atom. A method for patterning comprises: a process of applying the resist material on a substrate; a process of exposing light with high energy beam or electronic beam; and a process of developing.