| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide such a technology that prevents deformation, breakage or the like of a plate member in a processing chamber for substrates and carries it in nearly perpendicular direction. Ž<P>SOLUTION: The body 131 of a processing chamber 13 is slid to an evacuation frame 21 by a body moving mechanism 16, and a carrying jig 233 is moved upward and downward from a hot plate 15 at the same time. Then, the carrying jig 233 is coupled with the hot plate 15 by a coupling member 235. A winch 234 is operated to wind up a sling SU, thereby hoisting the hot plate 15 together with a winding carrying jig 233 to move it upward. Furthermore, the body 131 is returned into the processing frame 11, and the sling SU which is wound up by operating the winch 234 is rewound to carry the hot plate 15 downward together with the carrying jig 233. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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