| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a measurement method and a device for acquiring a 2-D image quickly with a high spatial resolution in the X-ray or an optical measurement. <P>SOLUTION: In a configuration applied to the 2-D image measurement device using fluorescent X rays, two independent collimators are arranged between the 2-D X-ray detector and a sample. The collimator near to the sample collimates the fluorescent X rays are shaped into parallel flux of 2-D and led to a detector through another collimator, the so that 2-D X-ray image is acquired. At this point, the energy of the fluorescent X rays arriving at the detector is sorted out by adjusting the angle between two collimators near about the critical angle of full X-ray reflection. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
