| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a production method and a production apparatus of tin hydride, for safely and efficiently producing tin hydride and achieving an easy process and excellent operability by a simple configuration. Ž<P>SOLUTION: The production method of tin hydride comprises collecting tin hydride while purifying from a reaction unit 1, generated by the reaction of a tin compound and a hydrogen compound, and filling a predetermined container 4 with the collected tin hydride, wherein the tin hydride is trapped at a temperature equal to or lower than the temperature of causing the above reaction and equal to or higher than the boiling point (-50°C) of tin hydride, and then collected at a temperature equal to or lower than the melting point (-150°C) of tin hydride. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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