| 摘要 |
PROBLEM TO BE SOLVED: To reduce an error caused by an effect of the plane roughness of a plane to be measured, and to detect the displacement of the plane to be measured with optimal accuracy meeting the purpose of measurement. SOLUTION: Projection light L projected from a light source 102 is made incident a light-adjusting member 130A and the resolution of the projection light L is adjusted by the light-adjusting member 130A. In the member 130A, a paraxial ray of the projection light L is intercepted and the light L is adjusted so that the resolution thereof is lowered. The projection light L of which the resolution is adjusted is condensed on the plane TG to be measured by a first objective 114. On the plane TG to be measured, the projection light L in a state of the beam diameter being extended is condensed. The projection light L condensed on the plane TG to be measured is reflected by the plane TG and reflected light Lr is received by a light-receiving element 120. By this, the resolution of a noncontact sensor 100A can be lowered and the measuring error caused by the effect of the plane roughness of the plane TG to be measured is reduced. Thus, the displacement of the plane TG to be measured can be detected with increased accuracy. COPYRIGHT: (C)2010,JPO&INPIT
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