| 摘要 |
A method of forming a transparent hydrocarbon-based polymer film on a substrate by plasma CVD includes: introducing a main gas consisting of a hydrocarbon gas (CalphaHbeta, wherein alpha and beta are natural numbers) and an inert gas at a flow ratio (R) of CalphaHbeta/inert gas of 0.25 or less into a CVD reaction chamber inside which a substrate is placed; and forming a hydrocarbon-based polymer film on the substrate by plasma polymerization of the gas at a processing temperature (T) wherein T<=(-800R+500).
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