METHOD FOR PRODUCTION OF WATER-REACTIVE Al FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER

摘要

A water-reactive Al film having In dispersed homogeneously in Al crystal particles can be produced by melting a material comprising 4NAI or 5NAI and In in an amount of 2 to 5 wt% relative to the amount of Al until the material becomes homogeneous in composition, and rapidly solidifying the molten material by an arc spraying method in which the molten material is sprayed on the surface of a base material by using Ar as a blowing gas.  A structural member for a film-forming chamber comprises the water-reactive Al film on its surface.