RESIN SEALING APPARATUS AND RESIN SEALING METHOD

摘要

PROBLEM TO BE SOLVED: To exactly make a pressure abnormal determination on a resin sealing by a simple method even in a region where a pressure change is large. SOLUTION: A resin sealing apparatus 22 for sealing a substrate K arranged in a cavity 42 with resin includes: a memory 72 for memorizing a pressure waveform Ps used as a standard; a pressure sensor 70 for detecting a real pressure of the resin in the cavity 42; an operation part 74 for setting up an allowable range of the real pressure based on a standard pressure wave form Ps; and a comparison determination part 78 for making an abnormal determination when the real pressure exceeds the allowable range, wherein the allowable range at a specific time point T is set up based on pressure values at other than the specific time point T on a time base in the standard pressure waveform Ps. COPYRIGHT: (C)2010,JPO&INPIT