| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an organic electroluminescent device capable of surely inspecting auxiliary wirings formed on a support substrate, even in an atmosphere that differs from an atmospheric air, as well, to provide a manufacturing method and apparatus therefor. Ž<P>SOLUTION: On the support substrate 110d in an top-emission type organic EL device 100, a plurality of auxiliary wirings 172 in contact with a second electrode layer 171 are extended in one direction, variations in the electrical resistance of the second electrode layer 171 can be canceled by the auxiliary wirings 172. Furthermore, since auxiliary wiring terminals 172a wider than a width dimension of the auxiliary wirings 172 are electrically connected to each of both ends of the auxiliary wirings 172, inspection of the auxiliary wirings 172 can be carried out, by making an inspection terminal, in contact with the auxiliary wiring terminals 172a inside a chamber, or the like, set in an environment which differs from the atmospheric air. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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