| 摘要 |
In a MEMS switch including a movable electrode member, a substrate, a transmission line electrode, and a fixed electrode, the substrate includes a bump formed at a predetermined position to support the movable electrode member at application of a driving voltage. The transmission line electrode is formed on the substrate, and the fixed electrode is formed on the substrate. The movable electrode member includes a movable electrode opposed to the fixed electrode, a first contact opposed to the transmission line electrode, and a second contact opposed to the bump. The movable electrode member is supported between the fixed electrode and the movable electrode at a predetermined initial gap. At application of a predetermined driving voltage to the fixed electrode, the movable electrode member moves in a direction of the substrate by an electrostatic force generated between the fixed electrode and the movable electrode.
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