发明名称 |
ROLL TO ROLL OLED PRODUCTION SYSTEM |
摘要 |
The present invention generally relates to a method and an apparatus for processing one or more substrates on a roll to roll system. The one or more substrates may pass through several processing chambers to deposit the layers necessary to produce an OLED structure. The processing chambers may include ink jetting chambers, chemical vapor deposition (CVD) chambers, physical vapor deposition (PVD) chambers, and annealing chambers. Additional chambers may also be present. |
申请公布号 |
WO2009134697(A2) |
申请公布日期 |
2009.11.05 |
申请号 |
WO2009US41709 |
申请日期 |
2009.04.24 |
申请人 |
APPLIED MATERIALS, INC.;WHITE, JOHN, M.;TAKEHARA, TAKAKO |
发明人 |
WHITE, JOHN, M.;TAKEHARA, TAKAKO |
分类号 |
H01L51/56;H01L51/52;H05B33/10 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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