| 摘要 |
PROBLEM TO BE SOLVED: To independently detect a force in each axis direction and a moment, regarding each axis by eliminating the interference of the other axis components, using a simple structure. SOLUTION: A support substrate 20 is arranged under a force-receiving object 10 for receiving a force to be detected, and four columnar objects 11-14 are connected in between the teo. A connection member with flexibility is inserted into vertical both ends of each of the columnar objects 11-14 so that the columnar objects 11-14 can be tilted, when the force receiving object 10 receives the force to displace. The gradient of each of the columnar objects 11-14 in the X-axis or Y-axis direction and displacement in the Z-axis direction are detected by sensors 21-24. Based on the detection result, a detection circuit 30 determines the forces Fx, Fy and Fz and the moments Mx, My and Mz. The force Fx is calculated, based on the gradient of each columnar object in the X-axis direction but is corrected, based on the value of the moment My calculated, based on the displacement of the columnar objects 11 and 12 in the Z-axis direction, and the interference of the My component is eliminated. COPYRIGHT: (C)2010,JPO&INPIT
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