| 摘要 |
<P>PROBLEM TO BE SOLVED: To relate to a mechanism for moving a sample, which drives a stage using an ultrasonic motor, and to cover the whole of a driving chip and a motor guide surface that configure the ultrasonic motor to form a closed region, and to provide a sealing between the closed region and the stage so that a particle generated, when moving the stage by the ultrasonic motor remains in the closed region and does not reach the sample. <P>SOLUTION: A mechanism includes a motor guide connected to a stage on which a sample is mounted, and which configures an ultrasonic motor; a driving chip which is fixed to a support bar, configures the ultrasonic motor, and contacts the motor guide with pressure, to apply a predetermined ultrasonic voltage for driving the motor guide; and a motor chamber which covers the motor guide and the driving chip and which forms a closed region, by providing a sealing part which seals a portion between the driving chip and the support bar which slides, when the driving chip drives the motor guide and moves. <P>COPYRIGHT: (C)2010,JPO&INPIT |
