ION RECOVERY DEVICE OF EUV LIGHT GENERATOR, AND ITS METHOD

摘要

PROBLEM TO BE SOLVED: To drastically reduce damage of a light collecting mirror by unrecoverable high-speed ions and adhesion to the light collecting mirror of low-speed ions small in an allowable quantity while reducing cost required for an EUV light generator, and to effectively collect EUV light by the light collecting mirror.

SOLUTION: Lines of magnetic force becoming parallel or nearly parallel to a laser light entering direction are generated at a point of EUV light generation or in the vicinity of the point of EUV light generation. Thereby, ions are captured by the lines of magnetic force. The captured ions are moved along the lines of magnetic force. The ions are guided to an entrance of an ion recovery means through a hole 3e formed on the light collecting mirror 3, and recovered.

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