| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor element capable of suppressing transmission of disturbance stress to a diaphragm from a mounted member, a method for manufacturing the same and a pressure sensor. SOLUTION: A sensor element 40 includes a beam part 43 supported projecting in cantilever shape into an opening part 42 from an open side face 42a of the opening 42 formed in an anti-mounting surface 40b of a substrate 41. A pressure reference chamber 44 in a sealed state is formed in the beam part 43. The diaphragm 45 displaced according to the pressure difference between the pressure of the pressure reference chamber 44 and the measured pressure of a pressure medium, and a pressure detecting part 46 provided on the diaphragm 45 and outputting a signal corresponding to the displacement of the diaphragm 45, are further formed in the beam part 43. COPYRIGHT: (C)2010,JPO&INPIT |
