SUBSTRATE TREATMENT DEVICE, ITS METHOD, AND SUBSTRATE TRANSPORT DEVICE

摘要

<P>PROBLEM TO BE SOLVED: To provide: a substrate treatment device capable of sufficiently reducing a transport time of a substrate; its method; and a substrate transport device. Ž<P>SOLUTION: In this substrate treatment device comprising an indexer block and a treatment block, a substrate W is transported between the indexer block and the treatment block by an indexer robot IR. The indexer robot IR is provided with a plurality of hand elements 260 mounted to be vertically arranged. The distance between the hand elements 260 is equal to the distance between substrate housing grooves of a carrier with the substrate W to be carried in the indexer block housed therein. The distance between support plates 51a (and between support plates 52a) vertically adjacent to each other of a substrate mounting part PASS2 arranged between the indexer block and the treatment block is twice as much as the distance between the hand elements 260. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž