| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a contact probe for making a contact section finer than that by a conventional method of stacking a metal layer on a support section. Ž<P>SOLUTION: The contact probe 2 includes the contact section 13 to be brought into contact with an inspecting object, and a beam section 11 for elastically supporting the contact section 13. The method for manufacturing the contact probe includes a contact section formation step of radiating an ion beam containing ions of conductive metal to the beam section 11 in an atmosphere containing compound gas, selectively depositing a part of compound gas to a proximity of an irradiation region of the ion beam on the beam section 11, and forming the contact section 13. In the contact section formation step, the ion beam is applied two-dimensionally for scanning on the beam section 11, and the part of compound gas is deposited while narrowing the scanning range of the ion beam with increase in height of the deposit. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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