摘要 |
PROBLEM TO BE SOLVED: To reduce the mass of a gyroscope rotor 60 without having to reduce the areas of control electrodes 23 and 24. SOLUTION: The gyroscope rotor 60 is formed in a bobbin shape. An electrode 21 for driving the rotor; the electrodes 23 and 24 for electrostatic support; and an electrode for displacement detection are formed in an inner circumferential part 53 of a gyroscope case 51. The case inner circumferential part 53 is freely fitted between a flange-like extension 63 of the gyroscope rotor 60. The electrode 21 for driving the rotor is led along the case inner circumferential part 53, raised outside, and three-dimensionally formed. Leader lines 54 of a plurality of the electrodes are led only to one surface of the gyroscope case 51, and a gyroscope mechanism part 50 is vacuum-locked from its opposite side. COPYRIGHT: (C)2010,JPO&INPIT
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