CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE,申请号KR20070113131-传众专利搜索

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发明名称	CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE
摘要
申请公布号	KR100924931(B1)	申请公布日期	2009.11.05
申请号	KR20070113131	申请日期	2007.11.07
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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