Method for measuring pole width of a slider of a disk drive device

摘要

A method for measuring pole width of a slider of a disk drive includes steps of: getting an original image of the pole surface; calculating the light intensity distribution profile of the original image and determining maximum and minimum light intensity data points of the profile; setting average of the maximum and minimum light intensity data points as a threshold; carrying out quadratic differentiation of the profile to obtain a quadratic differential asymptote; determining cross points between the quadratic differential asymptote and the threshold; calculating the distance between the cross points to obtain an initial pole width; and performing data compensation to the initial pole width to obtain a compensated pole width. The method may also measure the distance between edges of other micro-objects.