| 摘要 |
PURPOSE: A substrate cleaning device is provided to simply its structure by obtaining gaseous carbon dioxide from compressed liquid carbon dioxide and twin fluids composed of gaseous carbon dioxide and cleaning water without requiring a pressing unit . CONSTITUTION: A substrate cleaning device comprises a carbon dioxide storage(1), a cleaning water storage(2), a valve(7), and a nozzle(5). The carbon dioxide storage stores liquid carbon dioxide of high pressure. The valve supplies a fixed amount of carbon dioxide from the carbon dioxide storage. The nozzle receives the gas carbon dioxide through a first filter(3). The nozzle produces twin fluids composed of carbon dioxide and cleaning water by receiving cleaning water of the cleaning water storage through a second filter(4). The nozzle sprays the twin fluids on the substrate(6).
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