| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum valve capable of preventing part from being corroded. Ž<P>SOLUTION: A vacuum valve 1, which comprises a valve main body 4 in which a valve seat 10 is arranged between a first aperture 6 and a second aperture 7, a valve body 14 contacting with or separating from the valve seat 10, a driving section 2 applying driving force to the valve body 14 wherein the valve body 14 is attached to a rod member 29 projected within the valve main body 4, and a bellows 12 which is arranged within the valve main body 4 so that it may cover the rod member 29 and attaches the valve body 14 to valve seat side end surface, includes a purge gas supplying section 37 which is arranged between the valve main body 4 and the driving section 2 and supplies the purge gas, a purge gas discharging section 38 which is arranged between the valve main body 4 and the driving section 2 and discharges the purge gas, and arranges a communicating channel 39 making the purge gas supplying section 37 communicate with an internal space of the bellows 12 in the rod member 29. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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