发明名称 Method Of Forming Printhead By Removing Sacrificial Material Through Nozzle Apertures
摘要 A method of fabricating an inkjet printhead by forming a plurality of actuators on a monolithic substrate, covering the actuators with a sacrificial material, covering the sacrificial material with a printhead surface layer, defining a plurality of nozzle apertures in the printhead surface layer such that each of the actuators corresponds to one of the nozzle apertures and then, removing at least some of the sacrificial material on each of the actuators through the nozzle aperture corresponding to each of the actuators.
申请公布号 US2009275151(A1) 申请公布日期 2009.11.05
申请号 US20090501473 申请日期 2009.07.12
申请人 SILVERBROOK RESEARCH PTY LTD 发明人 SILVERBROOK KIA
分类号 H01L21/02 主分类号 H01L21/02
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