LASER PROCESSING APPARATUS FOR MONITORING PROCESSING STATE BY USING OPTICAL COHERENCE TOMOGRAPHY TECHNOLOGY

摘要

Disclosed is a laser processing apparatus for monitoring a processing state by using optical coherence tomography technology. The disclosed laser processing apparatus comprises: a processing unit that disrupts the molecular binding of a workpiece by using a femtosecond laser beam; a tomographic monitoring unit that monitors a three-dimensional state of the workpiece; and a controller that controls the output of femtosecond laser beam by using a three-dimensional tomographic image. The laser processing apparatus may further include a surface monitoring unit which monitors a surface state of the workpiece. The laser processing apparatus enables active control over its whole processes since the laser processing apparatus is able to monitor a processing state in real time.