| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical sensor for cleaning a detection section, and preventing detection capability from being deteriorated even if it is used for a long time, and an interface detector having the optical sensor. SOLUTION: The optical sensor has a spiral member disposed so as to surround the periphery of the detection section, and a drive means for driving the spiral member, abrades the detection section by using the spiral member driven by the drive means, and removes a deposit attached to the detection section. COPYRIGHT: (C)2010,JPO&INPIT |
