| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film thickness measurement device and a film thickness measurement method for measuring film thickness of a precise and stable transparent resin film without being affected by a holding member holding the transparent resin film, without damaging the transparent resin film and without erroneous measurement. Ž<P>SOLUTION: The film thickness measurement device measures the film thickness of the transparent resin film by irradiating the surface of the transparent resin film held on the holding member with inspection light, and receiving reflective light of the transparent resin film. The holding member has 1.0-8.0 μm of arithmetic average roughness Ra and 9.0-50.0 μm of the maximum height Ry measured in that a face holding the transparent resin film is conformed to JISB0601-1994. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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