发明名称 REDUCTION OF SUBSTRATE OPTICAL LEAKAGE IN INTEGRATED PHOTONIC CIRCUITS THROUGH LOCALIZED SUBSTRATE REMOVAL
摘要 Structures including optical waveguides disposed over substrates having a chamber or trench defined therein, and methods for formation thereof.
申请公布号 US2009274418(A1) 申请公布日期 2009.11.05
申请号 US20080113580 申请日期 2008.05.01
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 HOLZWARTH CHARLES;ORCUTT JASON S.;POPOVIC MILOS;HOYT JUDY L.;RAM RAJEEV
分类号 G02B6/26;C03B37/022 主分类号 G02B6/26
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