发明名称 |
REDUCTION OF SUBSTRATE OPTICAL LEAKAGE IN INTEGRATED PHOTONIC CIRCUITS THROUGH LOCALIZED SUBSTRATE REMOVAL |
摘要 |
Structures including optical waveguides disposed over substrates having a chamber or trench defined therein, and methods for formation thereof.
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申请公布号 |
US2009274418(A1) |
申请公布日期 |
2009.11.05 |
申请号 |
US20080113580 |
申请日期 |
2008.05.01 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
HOLZWARTH CHARLES;ORCUTT JASON S.;POPOVIC MILOS;HOYT JUDY L.;RAM RAJEEV |
分类号 |
G02B6/26;C03B37/022 |
主分类号 |
G02B6/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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