发明名称 |
Micro-electro-mechanical system device and method for making same |
摘要 |
According to the present invention, a micro-electro-mechanical system (MEMS) device comprises: a thin film structure including at least a metal layer and a protection layer deposited in any order; and a protrusion connected under the thin film structure. A preferred thin film structure includes at least a lower protection layer, a metal layer and an upper protection layer. The MEMS device for example is a capacitive MEMS acoustical sensor.
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申请公布号 |
US2009273043(A1) |
申请公布日期 |
2009.11.05 |
申请号 |
US20080217732 |
申请日期 |
2008.07.08 |
申请人 |
PIXART IMAGING INCORPORATION |
发明人 |
LEE SHENG TA;WANG CHUAN WEI |
分类号 |
H01L29/00;H01L21/311 |
主分类号 |
H01L29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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