| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing system which can cause different display portions to output different displays, and cause different operations to be carried out from different operation screens. <P>SOLUTION: When login information of a user is input from a main display device 18, the substrate processing system 1 refers to the login information, a user group parameter with which a group to which the user belongs is set, and an authority parameter which defines an authority of the group, and causes the main display device 18 to display a main operation screen 18a corresponding to the user; and, when login information of a user is input from an external operating apparatus 30, the substrate processing system causes an external display device 32 to display an external parameter setting screen 32b for setting an authority parameter of a group to which the user belongs, or to display an external operation screen 32 corresponding to the group to which the user belongs. <P>COPYRIGHT: (C)2010,JPO&INPIT |
