| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor structured not to use oil inside as a pressure-receiving medium, and to increase the measuring precision of the pressure sensor. Ž<P>SOLUTION: A pressure sensor 1 includes: a housing 4 having a vacuumed interior, including a first pressure input orifice 2 and a second pressure input orifice 3 arranged to face each other, and housing each component described later; a first diaphragm 5, attached to an edge of the first pressure input orifice 2, which bends in accordance with a pressure of fluid subjected to measuring; a first shaft 6 attached with its first end to the first diaphragm 5, perpendicularly coupled to the first diaphragm 5; a bellows 7, attached to the second pressure input orifice 3, which receives a pressure from an atmosphere; a cantilever 8 having an end 8a coupled to a second end of the first shaft 6 as well as to one end of the bellows 7; and a pressure sensing element 10 fixed between a retainer 9 and an end 8b of the cantilever 8. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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