PROBE CARD

摘要

A probe card which is easy to produce and wherein the positions of probes are precise. A support plate (2) is configured by gathering many ceramic tubes (5) which are approximately 1 to 100µm in diameter and 1 to 50µm in length (height) with the axes thereof parallel to one another, and fixing the external side with a frame (6). The assembly of the many ceramic tubes (5) is fixed by an adhesive (7) while arranged densely such that the centers (O1, O2, O3, O4) of four adjacent ceramic tubes (5) become the vertexes of a square.