发明名称 Method of fabricating nanodevices
摘要 <p>A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic "modules" which can be easily manipulated and shaped to fit standard mounts in various devices.</p>
申请公布号 EP1801068(A3) 申请公布日期 2009.11.04
申请号 EP20060126836 申请日期 2006.12.21
申请人 FEI COMPANY 发明人 SCHWIND, GREGORY;MAGERA, GERALD;SCIPIONI, LAWRENCE
分类号 B82B3/00 主分类号 B82B3/00
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