High purity carbon fiberreinforced carbon composite for semiconductor manufacturing apparatus and method for producing the same

摘要

A high-purity carbon fiber-reinforced carbon composite for a semiconductor manufacturing apparatus is provided. The carbon composite includes: a matrix having a crystalline carbon-based powder, a glassy carbon; and a carbon fiber. The sulfur content in the carbon composite is 5 ppm by mass or less. Additionally, a method for producing the carbon composite is provided. The method includes refining a carbon fiber-reinforced carbon composite comprising: a matrix including a crystalline carbon-based powder and glassy carbon; and a carbon fiber. The refining includes: heating the carbon composite at 1,800 to 2,400 °C after vacuuming in a refining furnace; and alternately repeating a first step of introducing a halogen-based gas to 50 kPa or more, and a second step of performing vacuuming to 20 kPa or less.