WAFER LOCATION ERROR INDICATING SYSTEM AND METHOD USING VISION SENSOR

摘要

PURPOSE: A wafer location error indicating system and method using vision sensor are provided to stop the wafer transfer process is in the error occurrence of the wafer position by measuring the wafer in real time. CONSTITUTION: The image pick-up unit(1) takes a photograph the wafer and wafer on the loading table in the real time. The video information recording unit records the photographing information transmitted from the image pickup unit. The wafer position error recognition monitor generates the control signal which stops the wafer transfer operation. The laser sensor(8) senses the shape of a wafer and is installed in the wafer loading table(5). The processing unit(2) has the algorithm for wafer position error method. The controller(3) sends the action stop signal to the semiconductor wafer installation transporting robot controller(7).