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经营范围
发明名称
SUSCEPTOR
摘要
申请公布号
EP1732111(A4)
申请公布日期
2009.11.04
申请号
EP20050721602
申请日期
2005.03.28
申请人
TOYO TANSO CO., LTD.
发明人
KIMOTO, TUNENOBU;MATSUNAMI, HIROYUKI;FUJIWARA, HIROKAZU
分类号
H01L21/205;C23C16/458;C30B25/12;C30B31/14;H01L21/00;H01L21/68;H01L21/683
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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