发明名称 ALUMINUM NITRIDE SINTERED BODY
摘要 An object of the present invention is to provide an aluminum nitride sintered body with high optical transmissivity and which has a smooth surface in the unpolished condition after firing. The aluminum nitride sintered body of the present invention is characterized by having an oxygen concentration of 450 ppm or less, a concentration of impurity elements excluding oxygen, nitrogen, and aluminum of 350 ppm or less, and an average crystal grain diameter of between 2 µm and 20 µm, and also having an arithmetic mean surface height-Ra of 1 µm or less and a maximum height Rz of 10 µm or less in the unpolished condition after firing.
申请公布号 EP1923372(A4) 申请公布日期 2009.11.04
申请号 EP20060782338 申请日期 2006.08.04
申请人 TOKUYAMA CORPORATION 发明人 KANECHIKA, YUKIHIRO;AZUMA, MASANOBU
分类号 C04B35/581;H01J61/02 主分类号 C04B35/581
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