发明名称
摘要 A semiconductor device in accordance with one embodiment of the present invention includes: a strained semiconductor layer formed on a substrate; and a strain measuring region, provided on the substrate, for measuring a strain of the semiconductor layer. The semiconductor device may further include: a reference information measuring region, provided on the substrate, for measuring reference information for evaluating the strain of the semiconductor layer.
申请公布号 JP4358216(B2) 申请公布日期 2009.11.04
申请号 JP20060265507 申请日期 2006.09.28
申请人 发明人
分类号 H01L21/66;H01L29/786 主分类号 H01L21/66
代理机构 代理人
主权项
地址