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发明名称
METHOD FOR EVALUATING THE EFFECTS OF MULTIPLE EXPOSURE PROCESSES IN LITHOGRAPHY
摘要
申请公布号
EP1634122(B1)
申请公布日期
2009.11.04
申请号
EP20040752670
申请日期
2004.05.19
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
FONSECA, CARLOS, A.;BUKOFSKY, SCOTT, J.;LAI, KAFAI
分类号
G03F7/20;G03C5/00;G03F9/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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