| 摘要 |
Sensor electrodes and wiring patterns can be formed with fewer processes, and easy assembly without interference between the wires and optical substrates is realized. Provided is a variable spectroscopy element (1) that includes two optical substrates (3a, 3b) that oppose each other at a distance therebetween and that include reflection films (2) on the opposing surfaces; actuators (3c) that change the distance between the optical substrates; sensors (6) having electrode portions (6a, 6b) that detect the distance between the optical substrates on the opposing surfaces; inclined surfaces (5) that are provided on at least one of the optical substrates (3a (3b)), in the outer peripheral parts of the opposing surfaces, and gradually increase the distance from the other optical substrate (3b (3a)) radially outward and in the plate-thickness direction; and connecting patterns (6e, 6f) that are provided on the inclined surfaces (5) and connect wiring patterns (6c (6d)) that connect to the electrode portions (6a (6b)) of the sensor (6) and connecting patterns (6e, (6f)) that are disposed radially outward with respect to the wiring patterns (6c, (6d)) and connect to wires (7) that output signals from the electrode portions (6a, (6b)) to external parts. |
