发明名称 Photonic coupling scheme for photodetectors
摘要 A room temperature operation polycrystalline infrared responsive photodetector, manufactured by a process, comprising the steps of patterning vacuum-deposited material and dry-etching a photonic crystal structure with resonant coupling tuned to long wavelengths.
申请公布号 US7611920(B1) 申请公布日期 2009.11.03
申请号 US20060601223 申请日期 2006.11.17
申请人 BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC. 发明人 JOST STEVEN R.
分类号 H01L21/20 主分类号 H01L21/20
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