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经营范围
发明名称
APPARATUS FOR REMOVING PARTICLES
摘要
申请公布号
KR20090011225(U)
申请公布日期
2009.11.03
申请号
KR20080005706U
申请日期
2008.04.29
申请人
发明人
分类号
H01L21/304;H01L21/02
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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