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发明名称
PARTS FOR SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FORMING COATING FILM
摘要
申请公布号
KR100924852(B1)
申请公布日期
2009.11.02
申请号
KR20070097315
申请日期
2007.09.27
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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