PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, CONTROL PROGRAM AND COMPUTER-READABLE STORAGE MEDIUM,申请号KR20080010337-传众专利搜索

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发明名称	PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, CONTROL PROGRAM AND COMPUTER-READABLE STORAGE MEDIUM
摘要
申请公布号	KR100924853(B1)	申请公布日期	2009.11.02
申请号	KR20080010337	申请日期	2008.01.31
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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