| 摘要 |
<p>A CARRIER (100) FOR A RETICLE USED IN PHOTOLITHOGRAPHIC SEMICONDUCTOR PROCESSING, HAVING A BASE PORTION (120) AND A COVER PORTION (140). THE BASE PORTION HAS A PLURALITY OF RETICLE SUPPORTS (122) AND A PLURALITY OF RETICLE POSITIONING MEMBERS (126, 128). THE COVER PORTION IS ADAPTED TO SEALINGLY MATE WITH THE BASE PORTION, AND HAS AN INNER SURFACE (141) WITH A PLURALITY OF SPACED APART RETICLE RESTRAINTS (142) AND A PAIR OF RETICLE POSITIONING TABS PROJECTING INWARDLY THEREFROM. EACH RETICLE POSITIONING TAB HAS A DIAGONAL EDGE PORTION, AND IS ORIENTED SO THAT THE DIAGONAL EDGE PORTION URGES A RETICLE RESTING ON THE RETICLE SUPPORTS INTO ENGAGEMENT WITH THE RETICLE RESTRAINTS WHEN THE COVER PORTION IS MATED WITH THE BASE PORTION.</p> |
